1～9 item / All 9 items
Demo units available for loan! This is a cassette-type batch cleaning device that can accommodate up to Φ300.
The 300mm wafer automatic cleaning device is a cassette-type batch cleaning system. It can accommodate up to Φ300. For more details, please contact us.
Demo units available for loan! We offer cleaning methods tailored to various processes (hoop compatibility available).
The sheet-type automatic cleaning device is a cleaning device that addresses spray-type cross-contamination in a sheet format. It is provided with cleaning methods tailored to various processes (hoop compatibility available). For more details, please contact us.
Demo units available for loan! We offer a variety of options including batch type and scrub cleaning.
This machine automatically transports masks stored in the loader, passing through each processing tank and storing them in the unloader. It supports various options such as batch type and scrub washing. Please contact us for more details.
Demo units available for loan! It includes brush cleaning and fine jet cleaning.
This machine is an automatic cleaning device that precisely cleans and dries carriers and boxes stored in a basket, transporting them from the loader through each processing stage to the unloader (which also serves as the drying section). For more details, please contact us.
Customization is okay! We offer quick responses and after-sales support unique to manufacturers.
The "RCA Wafer Cleaning System" is an automatic cleaning device primarily based on the RCA cleaning method, widely adopted as a highly reliable cleaning method. With a "3-axis multi-joint clean robot" for wafer transport and "FOUP" used for loaders and unloaders, it achieves cleaning in a non-particle environment. 【Features】 ■ Quick response from estimates to customization ■ Support for our own equipment as well as other manufacturers' equipment ■ Detailed response to sudden specification changes *For more details, please download the catalog or contact us. 【Exhibition Information】 SEMICON Japan Location: Tokyo Big Sight Period: December 13-15, 2017 Booth Number: 3509, East Hall
Demo units available for loan! Various designs can also be produced according to user specifications!
The cassette-less automatic cleaning device is a precision cleaning processing device that performs a consistent process from workpiece input to drying. The equipment can be selected with a cassette-less, boat transport method, and various designs can be manufactured according to the user's specifications.
Demo units available for loan! We also create various designs tailored to user specifications.
The cassette-less automatic cleaning device is a precision cleaning processing device that performs a consistent process from workpiece input to drying. The equipment can be selected with a cassette-less, boat transport method, and various designs can be manufactured according to user specifications. For more details, please contact us.
Demo units available for loan! This is a sheet-type cleaning device that can accommodate up to Φ300.
This machine is a dip-type single-sheet processing machine that vertically lifts the workpiece in the loader section and performs each processing step with a transport robot. After the final cleaning is completed, the workpiece is returned horizontally by the inversion mechanism, and spin drying is performed. It is a cassette-to-cassette cleaning machine. For more details, please contact us.
Customization is OK! We offer quick responses and after-sales support unique to manufacturers.
The "RCA Wafer Cleaning System" is an automatic cleaning device primarily based on RCA cleaning, widely adopted as a highly reliable cleaning method. It features a "3-axis multi-joint clean robot" for wafer transport and a "FOUP" used in the loader and unloader, achieving cleaning in a non-particle environment. 【Features】 ■ Quick response from quotes to customization ■ Support for not only our own equipment but also for other manufacturers' equipment ■ Detailed response to sudden specification changes *For more details, please download the catalog or contact us.
